J. Technology and Education, Vol.13, No.2, pp.39-45, 2006

研究論文

　

半導体製造装置における金属製防着治具の新しい製造

　

住毋家岩夫^*1、森本健太¹、比留間文彦^†2

¹�鞄d硝エンジニアリング　（〒347-0111　埼玉県北埼玉郡騎西町鴻茎3202-1）

²ウェールズ大学　（〒162-0825　東京都新宿区神楽坂1-2）

^†adm@u-wales.jp

　

New Integrated Production Technology of Metal Shield Parts in Equipment for Semiconductor Device Manufacturing

　

Iwao SUMOGE^*1, Kenta MORIMOTO¹, Fumihiko HIRUMA²

¹Densho Engineering Co., Ltd (3202-1, Koguki, Kisai, Kita-Saitama, Saitama 347-0111)

²University of Wales (1-2, Kagurazaka, Shinjuku, Tokyo 162-0825)

　

(Received June 6, 2006; Accepted September 11, 2006)

　

　

Abstract

　

In this study, we designed a new metal-spray coating that has great adhesive strength and which has metal shield parts. It can be used for producing CVD and PVD device parts. Its effectiveness has been verified.

In this field, three methods are typically used, namely plasma powder spraying, flame spraying (also known as rokide rod spraying) and arc spraying. Up until now these three methods have been applied separately.

By combining two of the above-mentioned three thermal spraying methods, we have been able to effectively compensate the defects of using the three spraying methods separately, resulting in much more effective shield parts.

　

Key words:　Thermal, Sprayed, Coating, Shield Parts