J.
Technology and Education, Vol.12, No.2, pp.39-45, 2005
研究論文
金属の溶射膜を形成したセラミック治具の新しい製造方法
住毋家 岩夫1、 比留間 文彦*2
1㈱電硝エンジニアリング （〒347-0111 埼玉県北埼玉郡騎西町鴻茎3202-1）
2ウェールズ大学 （〒162-0825 東京都新宿区神楽坂1-2）
*adm@u-wales.jp
Production of Ceramic Materials
with Thermal Sprayed Coatings
Iwao SUMOGE1 and Fumihiko HIRUMA*2
1Densho
Engineering Co.,ltd (3202-1, Koguki, Kisai, Kitasaitama, Saitama 347-0111)
2University
of Wales (1-2,Kagurazaka, Shinjuku, Tokyo 162-0825)
(Received September 14, 2005; Accepted December 13,
2005)
Abstract
This paper describes metal spraying of a strongly adhesive film onto
a ceramic substrate material, which could be used to create constituent parts
for semiconductor manufacturing equipment such as CVD and PVD.
For treatment of the
anchor (substrate) for metal spraying, a low pressure blast method was used to
give a ceramic surface with roughness of Ra=2.0～4.0 μm and Rmax=20～35μm.
An initial metal film was formed by plasma spraying onto the roughened
substrate surface and a second metal film with a rough surface was subsequently
applied using Rokide rod spraying.
Key words: Ceramics, Thermal, Metal Spraying, Coating
